Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 166-167; Iss. none
Helium ion implantation in SiAlON: Characterisation of cavity structures using TEM and IBA
P.B Johnson, P.W Gilberd, A Markwitz, A Raudsepp, I.W.M BrownVolume:
166-167
Year:
2000
Language:
english
Pages:
7
DOI:
10.1016/s0168-583x(99)00645-x
File:
PDF, 355 KB
english, 2000