Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 161-163; Iss. none
Ion beam analysis of nanoporous surfaces produced by He-implantation and oxidised by plasma-immersion ion-implantation
A Markwitz, P.B Johnson, P.W Gilberd, G.A Collins, D.D Cohen, N DytlewskiVolume:
161-163
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(99)00679-5
File:
PDF, 231 KB
english, 2000