Deuterium channeling analysis for He+-implanted 6H–SiC

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2000 Vol. 161-163; Iss. none

Deuterium channeling analysis for He+-implanted 6H–SiC

W Jiang, S Thevuthasan, W.J Weber, R Grötzschel
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Volume:
161-163
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(99)00692-8
File:
PDF, 173 KB
english, 2000
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