Ion beam energy attenuation for fabrication of buried,...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2000 Vol. 168; Iss. 1

Ion beam energy attenuation for fabrication of buried, variable-depth, optical waveguides

M.L von Bibra, A Roberts, S.D Dods
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Volume:
168
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(99)00721-1
File:
PDF, 237 KB
english, 2000
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