Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 166-167; Iss. none
Acceptor ion-implantation in SiC
Evan M. Handy, Mulpuri V. Rao, O.W. Holland, K.A. Jones, P.H. ChiVolume:
166-167
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(99)00867-8
File:
PDF, 92 KB
english, 2000