Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 161-163; Iss. none
Ion beam induced epitaxy experiments in silicon under channeling and random alignments
J.S Williams, I.M Young, M.J ConwayVolume:
161-163
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(99)00904-0
File:
PDF, 136 KB
english, 2000