Plasma immersion ion implantation using a glow discharge...

Plasma immersion ion implantation using a glow discharge source with controlled plasma potential

M. Ueda, G.F. Gomes, L.A. Berni, J.O. Rossi, J.J. Barroso, A.F. Beloto, E. Abramof, H. Reuther
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Volume:
161-163
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(99)00920-9
File:
PDF, 200 KB
english, 2000
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