Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 161-163; Iss. none
Plasma immersion ion implantation using a glow discharge source with controlled plasma potential
M. Ueda, G.F. Gomes, L.A. Berni, J.O. Rossi, J.J. Barroso, A.F. Beloto, E. Abramof, H. ReutherVolume:
161-163
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(99)00920-9
File:
PDF, 200 KB
english, 2000