Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 161-163; Iss. none
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Characterization of carbon nitride films deposited by hollow cathode discharge process
M Balaceanu, E Grigore, F Truica-Marasescu, D Pantelica, F Negoita, G Pavelescu, F IonescuVolume:
161-163
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(99)00957-x
File:
PDF, 140 KB
english, 2000