Amorphous carbon nitride films irradiated with argon ions

Amorphous carbon nitride films irradiated with argon ions

Jianjun Wang, Elidiane C. Rangel, Nilson C. da Cruz, Jacobus W. Swart, Mario A.B. de Moraes
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Volume:
166-167
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(99)01054-x
File:
PDF, 159 KB
english, 2000
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