Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 164-165; Iss. none
Emission energy distribution of secondary ions produced through the electronic sputtering process under heavy ion bombardment
Nobutsugu Imanishi, Hideyuki Ohta, Satoshi Ninomiya, Akio ItohVolume:
164-165
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(99)01077-0
File:
PDF, 157 KB
english, 2000