On the temperature dependence of sputtered cluster yields

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2000 Vol. 164-165; Iss. none

On the temperature dependence of sputtered cluster yields

C Staudt, R Heinrich, P Mazarov, A Wucher, V.I Tugushev, N.Kh Dzhemilev
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Volume:
164-165
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(99)01117-9
File:
PDF, 179 KB
english, 2000
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