Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 166-167; Iss. none
Solid state reaction in Si–C multilayers induced by ion bombardment
F. Harbsmeier, W. Bolse, A.-M. FlankVolume:
166-167
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(99)01169-6
File:
PDF, 829 KB
english, 2000