Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 166-167; Iss. none
Diffusion and solubility of Au implanted into the AZ1350 photoresist
M.R.F. Soares, J.R.A. Kaschny, J.H.R. dos Santos, L. Amaral, M. Behar, D. FinkVolume:
166-167
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(99)01193-3
File:
PDF, 134 KB
english, 2000