Structure characterization of carbon and fluorine-doped...

Materials Chemistry and Physics 2001 Vol. 71; Iss. 2

Structure characterization of carbon and fluorine-doped silicon oxide films with low dielectric constant

Shi-Jin Ding, Li Chen, Xin-Gong Wan, Peng-Fei Wang, Jian-Yun Zhang, David Wei Zhang, Ji-Tao Wang
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Volume:
71
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0254-0584(00)00530-7
File:
PDF, 147 KB
english, 2001
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