DC reactive sputter deposition of ZnO:Al thin film on glass

Materials Chemistry and Physics 2001 Vol. 72; Iss. 2

DC reactive sputter deposition of ZnO:Al thin film on glass

Jyh-Ming Ting, B.S. Tsai
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Volume:
72
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0254-0584(01)00451-5
File:
PDF, 180 KB
english, 2001
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