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Low temperature oxidation of CVD SiC by electron cyclotron resonance plasma
Takashi Goto, Hiroshi Masumoto, Mineo NiizumaVolume:
75
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0254-0584(02)00068-8
File:
PDF, 231 KB
english, 2002