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Transmission electron microscopy investigation of the microstructure and chemistry of Si/Cu/In/Cu/Si interconnections
S. Sommadossi, L. Litynska, P. Zieba, W. Gust, E.J. MittemeijerVolume:
81
Year:
2003
Language:
english
Pages:
3
DOI:
10.1016/s0254-0584(03)00076-2
File:
PDF, 94 KB
english, 2003