Optimization of the deposition process of ZrN and TiN thin...

Optimization of the deposition process of ZrN and TiN thin films on Si(1 0 0) using design of experiment method

Wen-Jun Chou, Chun-Hsing Sun, Ge-Ping Yu, Jia-Hong Huang
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Volume:
82
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0254-0584(03)00209-8
File:
PDF, 245 KB
english, 2003
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