Growth of tantalum boron nitride films on Si by radio...

Growth of tantalum boron nitride films on Si by radio frequency reactive sputtering: effect of N2/Ar flow ratio

Shun-Tang Lin, Chiapyng Lee
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Volume:
82
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0254-0584(03)00339-0
File:
PDF, 266 KB
english, 2003
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