Effect of fluorine on moisture absorption and dielectric...

Effect of fluorine on moisture absorption and dielectric properties of SiOF films

Seoghyeong Lee, Jong-Wan Park
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Volume:
53
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0254-0584(97)02067-1
File:
PDF, 436 KB
english, 1998
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