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Ion implantation into amorphous solids
W.F. van der Weg, A.J.M. Berntsen, F.W. Saris, A. PolmanVolume:
46
Year:
1996
Language:
english
Pages:
7
DOI:
10.1016/s0254-0584(97)80007-7
File:
PDF, 779 KB
english, 1996