Deposition of cubic boron nitride thin films by IBED

Materials Chemistry and Physics 1998 Vol. 53; Iss. 3

Deposition of cubic boron nitride thin films by IBED

Kuang Yuanzhu, Huang Xiaogang, You Dawei, Wang Xingmin, Lin Wenlian
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Volume:
53
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0254-0584(98)00048-0
File:
PDF, 302 KB
english, 1998
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