Surface smoothing effects with reactive cluster ion beams
Noriaki Toyoda, Hiroaki Kitani, Norihisa Hagiwara, Jiro Matsuo, Isao YamadaVolume:
54
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0254-0584(98)00095-9
File:
PDF, 517 KB
english, 1998