Angular distributions of the particles sputtered with Ar cluster ions
Noriaki Toyoda, Hiroaki Kitani, Norihisa Hagiwara, Takaaki Aoki, Jiro Matsuo, Isao YamadaVolume:
54
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0254-0584(98)00101-1
File:
PDF, 512 KB
english, 1998