Formation of epitaxial cobalt silicide films on (1 0 0) Si...

Formation of epitaxial cobalt silicide films on (1 0 0) Si using Co/Ti, Co/Nb, and Co/Hf bilayers

Youngjae Kwon, Chongmu Lee
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Volume:
63
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0254-0584(99)00211-4
File:
PDF, 450 KB
english, 2000
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