SiC MEMS: opportunities and challenges for applications in...

SiC MEMS: opportunities and challenges for applications in harsh environments

Mehran Mehregany, Christian A Zorman
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Volume:
355-356
Year:
1999
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(99)00374-6
File:
PDF, 2.10 MB
english, 1999
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