Comparison of electron concentrations, electron temperatures, gas kinetic temperatures, and excitation temperatures in argon ICPs operated at 27 and 40 MHz
Mao Huang, Scott A. Lehn, Elizabeth J. Andrews, Gary M. HieftjeVolume:
52
Year:
1997
Language:
english
Pages:
21
DOI:
10.1016/s0584-8547(97)00007-4
File:
PDF, 1.23 MB
english, 1997