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Hardware and software systems for the determination of charged particle parameters in low pressure plasmas using impedance-tuned Langmuir probes
Yuancai Ye, R.Kenneth MarcusVolume:
52
Year:
1997
Language:
english
Pages:
17
DOI:
10.1016/s0584-8547(97)00098-0
File:
PDF, 1.15 MB
english, 1997