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Electron temperature and radiative attachment continua in enclosed inductively coupled plasma in argon and chlorine
Alexander A. Bol'shakov, Ramon M. BarnesVolume:
52
Year:
1997
Language:
english
Pages:
24
DOI:
10.1016/s0584-8547(97)00100-6
File:
PDF, 1.84 MB
english, 1997