New supplying evaporation precursor method with CVD

Heat Transfer - Asian Research 2009 Vol. 38; Iss. 5

New supplying evaporation precursor method with CVD

Motohiro Oshima, Akiko Komeda, Koji Tominaga, Motoi Nakao, Tetsuo Shimizu, Jiro Senda, Kozo Ishida
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Volume:
38
Year:
2009
Language:
english
Pages:
13
DOI:
10.1002/htj.20235
File:
PDF, 974 KB
english, 2009
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