NF3 decomposition over some metal oxides in the absence of...

NF3 decomposition over some metal oxides in the absence of water

Xianjun Niu, Liang Sun, Yanan Wang, Haipeng Wu, Xiufeng Xu
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Volume:
19
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/s1003-9953(09)60107-9
File:
PDF, 1001 KB
english, 2010
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