![](/img/cover-not-exists.png)
Case study and efficient modelling for variational chemical-mechanical planarisation
Zhang, X., He, L., Gerousis, V., Song, L., Teng, C.-C.Volume:
2
Year:
2008
Language:
english
DOI:
10.1049/iet-cds:20070187
File:
PDF, 441 KB
english, 2008