Microcrystalline and polycrystalline silicon films for...

IEE Proceedings - Circuits Devices and Systems 2003 Vol. 150; Iss. 4

Microcrystalline and polycrystalline silicon films for solar cells obtained by gas-jet electron-beam PECVD method

Bilyalov, R., Poortmans, J., Sharafutdinov, R., Khmel, S., Schukin, V., Semenova, O., Fedina, L.
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Volume:
150
Year:
2003
Language:
english
DOI:
10.1049/ip-cds:20030665
File:
PDF, 565 KB
english, 2003
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