Influence of the preoxidation cleaning on the electrical properties of thin SIO2 layers
Prom, J.L., Castagne, J., Sarrabayrouse, G., Munoz-Yague, A.Volume:
135
Year:
1988
Language:
english
DOI:
10.1049/ip-i-1.1988.0005
File:
PDF, 308 KB
english, 1988