Use of an ion energy analyser-mass spectrometer to measure ion kinetic-energy distributions from RF discharges in argon-helium gas mixtures
Olthoff, J.K., Van Brunt, R.J., Radovanov, S.B., Rees, J.A.Volume:
141
Year:
1994
Language:
english
DOI:
10.1049/ip-smt:19949920
File:
PDF, 499 KB
english, 1994