Optimisation of empirical model for IC fabrication process...

IEE Proceedings - Science Measurement and Technology 1998 Vol. 145; Iss. 2

Optimisation of empirical model for IC fabrication process using linear programming

Sprevak, D., Ferguson, R.S., Walton, A.J., Newsam, M.I.
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Volume:
145
Year:
1998
Language:
english
DOI:
10.1049/ip-smt:19981810
File:
PDF, 322 KB
english, 1998
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