CMOS compatible electrochemical process for improving...

Micro & Nano Letters 2010 Vol. 5; Iss. 5

CMOS compatible electrochemical process for improving quality factor of spiral microinductors

Ling-Yi Ding, Wen-Pin Shih, Yuh-Chung Hu, Yi-Jie Chen, Pei-Zen Chang
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Volume:
5
Year:
2010
Language:
english
DOI:
10.1049/mnl.2010.0087
File:
PDF, 490 KB
english, 2010
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