Optimal materials and process conditions of functional...

Micro & Nano Letters 2011 Vol. 6; Iss. 7

Optimal materials and process conditions of functional layers for piezoelectric MEMS process at high temperature

Dong-Yeon Lee, Jaesool Shim, Tae Song Kim, Jae Hong Park
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Volume:
6
Year:
2011
Language:
english
DOI:
10.1049/mnl.2011.0049
File:
PDF, 633 KB
english, 2011
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