Thermal switch design by using complementary metal??oxide...

Micro & Nano Letters 2011 Vol. 6; Iss. 7

Thermal switch design by using complementary metal??oxide semiconductor MEMS fabrication process

Jin-Chern Chiou, Lei-Chun Chou, You-Liang Lai, Ying-Zong Juang, Sheng-Chieh Huang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
6
Year:
2011
Language:
english
DOI:
10.1049/mnl.2011.0122
File:
PDF, 367 KB
english, 2011
Conversion to is in progress
Conversion to is failed