Perspectives on MEMS in bioengineering: a novel capacitive position microsensor [and laser surgery and drug delivery applications]
Pedrocchi, A., Hoen, S., Ferrigno, G., Pedotti, A.Volume:
47
Year:
2000
Language:
english
Pages:
4
DOI:
10.1109/10.817612
File:
PDF, 96 KB
english, 2000