High-speed solution switching using piezo-based...

High-speed solution switching using piezo-based micropositioning stages

Stilson, S., McClellan, A., Devasia, S.
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Volume:
48
Year:
2001
Language:
english
Pages:
9
DOI:
10.1109/10.930905
File:
PDF, 213 KB
english, 2001
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