Effect of fluorine incorporation on the thermal stability...

IEEE Transactions on Electron Devices 1993 Vol. 40; Iss. 1

Effect of fluorine incorporation on the thermal stability of PtSi/Si structure

Bing-Yue Tsui, Jiunn-Yan Tsai, Tzong-Shien Wu, Mao-Chien Chen
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Volume:
40
Year:
1993
Language:
english
Pages:
10
DOI:
10.1109/16.249424
File:
PDF, 1.10 MB
english, 1993
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