The effects of fluorine passivation on polysilicon...

IEEE Transactions on Electron Devices 1994 Vol. 41; Iss. 5

The effects of fluorine passivation on polysilicon thin-film transistors

Horng Nan Chern, Chung Len Lee, Tan Fu Lei
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Volume:
41
Year:
1994
Language:
english
Pages:
5
DOI:
10.1109/16.285019
File:
PDF, 498 KB
english, 1994
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