![](/img/cover-not-exists.png)
Improvement of water-related hot-carrier reliability by using ECR plasma-SiO2
Machida, K., Shimoyama, N., Takahashi, J.-I., Takahashi, Y., Yabumoto, N., Arai, E.Volume:
41
Year:
1994
Language:
english
Pages:
6
DOI:
10.1109/16.285021
File:
PDF, 624 KB
english, 1994