Performance and reliability evaluation of high dielectric...

Performance and reliability evaluation of high dielectric LDD spacer on deep sub-micrometer LDD MOSFET

Jyh-Chyurn Guo, Chih-Yua Lu, Hsu, C.C.-H., Pole-Shan Lin, Chung, S.S.-S.
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Volume:
41
Year:
1994
Language:
english
Pages:
10
DOI:
10.1109/16.293354
File:
PDF, 950 KB
english, 1994
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