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A new fabrication technology for AlGaAs/GaAs HEMT LSIs using InGaAs nonalloyed ohmic contacts
Kuroda, S., Harada, N., Katakami, T., Mimura, T., Abe, M.Volume:
36
Year:
1989
Language:
english
Pages:
8
DOI:
10.1109/16.40900
File:
PDF, 847 KB
english, 1989