Surface micromachined piezoresistive pressure sensors with...

IEEE Transactions on Electron Devices 1996 Vol. 43; Iss. 9

Surface micromachined piezoresistive pressure sensors with step-type bent and flat membrane structures

Lisec, T., Kreutzer, M., Wagner, B.
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Volume:
43
Year:
1996
Language:
english
Pages:
6
DOI:
10.1109/16.535348
File:
PDF, 936 KB
english, 1996
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