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Influence of post-oxidation cooling rate on residual stress and pn-junction leakage current in LOCOS isolated structures
Smeys, P., Griffin, P.B., Saraswat, K.C.Volume:
43
Year:
1996
Language:
english
Pages:
5
DOI:
10.1109/16.543037
File:
PDF, 509 KB
english, 1996