A temperature all-silicon micro-sensor based on the thermo-optic effect
Cocorullo, G., Della Corte, F.G., Iodice, M., Rendina, I., Sarro, P.M.Volume:
44
Year:
1997
Language:
english
Pages:
9
DOI:
10.1109/16.568038
File:
PDF, 249 KB
english, 1997