Promising storage capacitor structures with thin Ta2O 5 film for low-power high-density DRAMs
Shinriki, H., Kisu, T., Kimura, S.-I., Nishioka, Y., Kawamoto, Y., Mukai, K.Volume:
37
Year:
1990
Language:
english
Pages:
9
DOI:
10.1109/16.57154
File:
PDF, 1.04 MB
english, 1990